CITATION.cff

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cff-version: 1.2.0
title: ASML_JobCreator
message: >-
  If you use this software, please cite it using the
  metadata from this file.
type: software
authors:
  - given-names: Demis
    family-names: John
    name-particle: D.
    email: demis@ucsb.edu
    affiliation: University of California Santa Barbara
    orcid: 'https://orcid.org/0000-0001-9588-0124'
  - name: UCSB Nanofabrication Facility
    address: 'Engineering Sciences, Bldg #225'
    city: Santa Barbara
    post-code: '93106'
    region: CA
    email: nanofab-job-inquiry@ece.ucsb.edu
    tel: '8058935934'
    country: US
    website: 'https://nanofab.ucsb.edu/'
    alias: UCSB NanoFab
  - given-names: Theodore
    family-names: Morin
    affiliation: University of California Santa Barbara
  - given-names: Miguel
    family-names: Daal
    affiliation: University of California Santa Barbara
repository-code: 'https://github.com/demisjohn/ASML_JobCreator/'
url: >-
  https://wiki.nanofab.ucsb.edu/wiki/ASML_Stepper_3_-_Job_Creator
abstract: >-
  Python program your Job files for an ASML PAS 5500 Stepper
  Lithography system, by the UCSB Nanofabrication Facility.
keywords:
  - semiconductor
  - microfabrication
  - photolithography
  - python
license: GPL-3.0-or-later
version: 1.4.3
date-released: '2024-01-03'