torch smo opc imaging lithography ilt mask-optimization design-for-manufacturing jax differentiable-programming computational-lithography abbe vector-lithography resist-modeling

deep-neural-networks deep-learning neural-network ide pytorch ode dde dynamical-systems differential-equations laplace-transform delay-differential-equations riemann-sphere ilt stereographic-projection neural-differential-equations stiff-ode integro-differential-equations inverse-laplace-transform forced-ode